Low temperature doping of arsenic atoms in silicon during Pd2Si formation
- I. Ohdomari
- K. Suguro
- et al.
- 1982
- Thin Solid Films
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2 results for K. Suguro
Low-temperature redistribution of As in Si during Pd2Si formation
- I. Ohdomari
- K.N. Tu
- et al.
- 1981
- Applied Physics Letters