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Publication
CLEO 2014
Conference paper
Zn+ implanted silicon waveguide photodiodes for on-chip mid-infrared detection
Abstract
We present the first experimental demonstration of Zn+ implanted Si waveguide photodiodes for 2.2-2.4 μm operation. Preliminary responsivities > 65 mA/W are measured, suggesting suitability for on-chip sensing and communications applications in the mid-infrared.