PaperEffects of deuterium plasmas on silicon near-surface propertiesJ.L. Lindström, G.S. Oehrlein, et al.Journal of Applied Physics
PaperHydrogen plasma induced defects in siliconS.-J. Jeng, G.S. Oehrlein, et al.Applied Physics Letters
PaperDoping and dopant behavior in (Al,Ga)As grown by metalorganic vapor phase epitaxyT.F. Kuech, M.A. Tischler, et al.Journal of Crystal Growth