Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Inteirconnecction of components in a VLSI chip is becoming an increasingly complex problem. In this paper we examine the complexity of the wire routing process and discuss several new approaches to solving the problem using a parallel system architecture. The ma-chines discussed range from compact systems for highly specialized applications to more general designs suited for broader applications. The process speedup due to parallelism and the cost advantage due to the use of large numbers of identical VLSI parts make these new machines practical today. Copyright © 1983 by The Institute of Electrical and Electronics Engineers, Inc.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
György E. Révész
Theoretical Computer Science
Alessandro Morari, Roberto Gioiosa, et al.
IPDPS 2011
Nanda Kambhatla
ACL 2004