John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
We use vector-valued multiwavelets on compact sets to develop a Galerkin method for systems of integral equations of the second kind. We propose a compression strategy for the coefficient matrix of the linear system obtained from this method and show that the compressed scheme preserves almost optimal convergence rate of the original scheme and yields a sparse matrix with a bounded condition number.
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
David Cash, Dennis Hofheinz, et al.
Journal of Cryptology
R.B. Morris, Y. Tsuji, et al.
International Journal for Numerical Methods in Engineering
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990