Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
We use vector-valued multiwavelets on compact sets to develop a Galerkin method for systems of integral equations of the second kind. We propose a compression strategy for the coefficient matrix of the linear system obtained from this method and show that the compressed scheme preserves almost optimal convergence rate of the original scheme and yields a sparse matrix with a bounded condition number.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
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Proceedings of SPIE 1989
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ISIT 2007