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No abstract available.
F.M. Schellenberg, R.L. Byer, et al.
IQEC 1988
Thomas F. Magnera, V. Balaji, et al.
Macromolecules
R.D. Allen, Juliann Opitz, et al.
SPIE Advances in Resist Technology and Processing 1999
R. Sooriyakumaran, B. Davis, et al.
Microlithography 2004