Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials
No abstract available.
Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials
Hiroshi Ito, Reinhold Schwalm
JES
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008