Uncertainty analysis for low P:B xeds measurements - variation of aluminum in silicon nitride

Abstract

The uncertainties associated with X-ray energy-dispersive spectroscopy measurements and quantification are reviewed and an equation is developed which follows the propagation of uncertainties through concentration-normalization calculations. Those errors not included in the typical error calculations are pointed out. A statistical approach to data acquisition and reduction which includes variations due to operator-selected parameters and operating conditions is described. The power of this simple method is demonstrated in the determination of the variation in aluminum content of silicon nitride. © 1987.