ULTRAPURE POLYIMIDES: SYNTHESES AND APPLICATIONS.

Abstract

A zone refining technique has been perfected for use with organic materials and these precursors have been used to synthesize ultrapure polyamic acids for IC device applications. The key feature of the synthesis is the use of solid ingots of the dianhydrides. Materials prepared by this technique show low metallic impurities and have been shown to be excellent film formers for a variety of applications. In particular a polyimide derived from PMDA-ODA has been used to passivate magnetic bubble devices. IR techniques coupled with electrical measurements have been used to optimize the cure conditions and a simple resist process has been defined to passivate these devices. Device performance compares well with conventional inorganic insulators.