O.F. Schirmer, K.W. Blazey, et al.
Physical Review B
A design for an ultra-small MOSFET is presented. MOSFETs with submicron channel lengths (L ≲ 0.25 μm) that operate with controlled punchthrough current are analyzed by two-dimensional numerical modeling. Current-voltage characteristics for subthreshold, nonsaturated and saturated regions of operation were obtained at various temperatures for devices of different channel length. The results indicate that device current is due to barrier-limited, space-charge-limited and surface-inversion conduction processes. © 1985.
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B
M.A. Lutz, R.M. Feenstra, et al.
Surface Science
Ellen J. Yoffa, David Adler
Physical Review B
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films