Publication
QIM 2019
Conference paper

Ultra-low dissipation mechanical resonators for cavity optomechanics

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Abstract

We study the theory of dissipation dilution and realize two experimental techniques-“elastic-strain engineering” and “clamp-tapering”-for exceptional mechanical quality factors (Q× f > 1015Hz) of high stress Si3N4 nanobeams at room temperature.

Date

04 Apr 2019

Publication

QIM 2019

Authors

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