Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
For disordered systems governed by activated processes with a broad distribution of barrier heights, the susceptibility should obey logarithmic frequency scaling, and the associated noise power spectrum should be of the 1/f-type (with logarithmic corrections). Further, various /2 rules can be derived from the Kramers-Kronig relationships. The results are valid both near T=0 and near a phase transition when the latter exists. Two new examples of this very general behavior are discussed: the thermal properties of ordinary glasses and the impurity conduction and dielectric response of insulators. © 1987 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.Z. Sun
Journal of Applied Physics
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics