Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Transport measurements of p-type modulation doped pseudomorphic heterostructures show that the interfaces of Si/SiGe in either growth direction have the same high quality. Magneto-transport results indicate that the degeneracy of the heavy and light hole bands at the zone center is lifted. SdH spectra show anomalous resolution of filling factors resulting from the interplay of spin splittings of the adjacent Landau levels anisotropy of the g-factor found for these structures. With a novel stress relieved superlattice substrate, the g-factor anisotropy was found to be greatly reduced. © 1992.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
Ming L. Yu
Physical Review B