Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We investigated transport properties of ultra-thin CaBaCuO (CBCO) films, focusing on vortex dynamics. By measuring current-voltage characteristics we found evidence that at high temperatures the vortices are thermally activated at the edges of the bridge and pushed in, causing dissipation and power-law dependence of the voltage from the current. At lower temperatures, the experimental curves change shape. We compared these data with the predicted behaviour for vortex quantum tunnelling and found a very good agreement. Measurements performed at ultra-low temperatures (down to 60 mK) in a particular low noise environment provide additional evidence of the robustness of the observed effects. © 2007 Elsevier B.V. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Physical Review B
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arXiv
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SPIE Advances in Semiconductors and Superconductors 1990