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Modeling polarization for Hyper-NA lithography tools and masks
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It is shown how a wide variety of transversal theorems can be given a common proof. The proof depends on a certain matrix being totally unimodular, and it is shown that total unimodularity is needed for the theorem to hold. © 1976.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Mathematical Biosciences