S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007