Publication
International Conference on Laser Processing and Diagnostics 1983
Conference paper
TIME RESOLVED CALORIMETRY OF 30 nm Te-FILMS DURING LASER ANNEALING.
Abstract
The temperature of 30 nm thick Te films has been studied during annealing with a XeCl Excimer laser. Using a pyroelectric thin film calorimeter melting, boiling and recrystallization were observed. Boiling was identified as the prevalent mechanism for the loss of material.