M. Rajaratnam, M. Reilly, et al.
Microelectronic Engineering
A report is presented on the thermal decomposition behavior of several polymethacrylates and the effect of the ester structure on the thermolysis in correlation with the photosensitivity in acid-catalyzed thermolysis. Differential scanning calorimetry (DSC) curves of the polymethacrylates and presented together with that of PMAA Polymethacrylic Acid PMAA loses absorbed water below 140°C (1st heating), and then dehydrates to form PMAN, at the temperature ranging from 180 to 260°C.
M. Rajaratnam, M. Reilly, et al.
Microelectronic Engineering
T.P. Russell, Hiroshi Ito, et al.
Macromolecules
A.T.S. Pomerene, K.E. Petrillo, et al.
Microlithography 1994
Hiroshi Ito
SPIE Advances in Resist Technology and Processing 1999