Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We clarify basic mechanisms for focused field emission of electrons from a point source. The effective potential barrier arising from the lateral confinement of current carrying states is shown to be essential for subband filtering. A hornlike opening at the emission plane further improves the collimation even if the transport is not adiabatic. We predict novel source- and field-dependent resonance effects which can affect the emission characteristics. © 1990 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.C. Marinace
JES
Michiel Sprik
Journal of Physics Condensed Matter
A. Reisman, M. Berkenblit, et al.
JES