Conference paper
Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
We provide a simple mathematical framework which is useful for a precise description of the thermal equilibrium Wigner function and for obtaining approximations to it in both cases of Boltzmann and Fermi Dirac statistics. Regular and singular asymptotic expansions of this Wigner function are derived and their validity shown for respectively smooth and discontinuous potentials. © 1991.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Robert F. Gordon, Edward A. MacNair, et al.
WSC 1985
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
Chai Wah Wu
Linear Algebra and Its Applications