Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
We provide a simple mathematical framework which is useful for a precise description of the thermal equilibrium Wigner function and for obtaining approximations to it in both cases of Boltzmann and Fermi Dirac statistics. Regular and singular asymptotic expansions of this Wigner function are derived and their validity shown for respectively smooth and discontinuous potentials. © 1991.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
M. Shub, B. Weiss
Ergodic Theory and Dynamical Systems
Matthew A Grayson
Journal of Complexity
Robert Manson Sawko, Malgorzata Zimon
SIAM/ASA JUQ