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Micro and Nano Engineering
A dual delay line surface acoustic wave (SAW) sensor on an ST-quartz substrate has been used to study water uptake and downtake and its effect on adhesion in both cured and uncured polyimide films. Film samples both with and without adhesion promoter have been studied. The experimental results suggest the possibility of using a SAW sensor as a cure indicator, humidity sensor or adhesion sensor. © 1991.
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Ming L. Yu
Physical Review B
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures
T.N. Morgan
Semiconductor Science and Technology