David B. Mitzi
Journal of Materials Chemistry
A dual delay line surface acoustic wave (SAW) sensor on an ST-quartz substrate has been used to study water uptake and downtake and its effect on adhesion in both cured and uncured polyimide films. Film samples both with and without adhesion promoter have been studied. The experimental results suggest the possibility of using a SAW sensor as a cure indicator, humidity sensor or adhesion sensor. © 1991.
David B. Mitzi
Journal of Materials Chemistry
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997