Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The structure and morphology of laser written lines has been examined in a Te81Ge15As4 glass by transmission and scanning electron microscopes. It is found that the difference in optical reflection and transmission properties between the laser exposed and unexposed regions in the specimen can be ascribed only in part to an amorphous to crystalline transformation. The remaining difference is attributed to a smoothening of the external surface and formation of voids in the film. © 1972.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
J.A. Barker, D. Henderson, et al.
Molecular Physics