Beomseok Nam, Henrique Andrade, et al.
ACM/IEEE SC 2006
Beomseok Nam, Henrique Andrade, et al.
ACM/IEEE SC 2006
Yigal Hoffner, Simon Field, et al.
EDOC 2004
Joel L. Wolf, Mark S. Squillante, et al.
IEEE Transactions on Knowledge and Data Engineering
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007