Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The indeterminate state of the empirical law of electrodynamic action between two current elements is reviewed. It is shown that a form of the law fully consistent with experiment can be deduced from simple Newtonian dynamics. This law points to anomalies to be expected in electrodynamic interactions between electric particles of unequal charge-mass ratio. This result may account for certain hitherto unexplained anomalies in electric discharge phenomena. © 1969.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Andrew Skumanich
SPIE Optics Quebec 1993
Zhihua Xiong, Yixin Xu, et al.
International Journal of Modelling, Identification and Control
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007