Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A model describing the salient features of tensile stress‐strain curves of ceramic–fiber composites has been developed. The model incorporates statistics of fiber failure. Furthermore, the compliance of the testing machine is included so that the onset of instability can be predicted. An experiment conducted on a composite consisting of a glass‐ceramic matrix reinforced with SiC fibers exhibits excellent agreement with the predicted behavior. Copyright © 1990, Wiley Blackwell. All rights reserved
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
P. Alnot, D.J. Auerbach, et al.
Surface Science
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
David B. Mitzi
Journal of Materials Chemistry