Publication
INTERMAG 2003
Conference paper

TEM characterization for magnetic nano structure processing

Abstract

A report on the characterization of magnetic nanostructure processing was presented. In the Magnetic Information Storage industry critical scale dimensions for sensor and thin film disc materials entered the nanoscale regime. Transmission electron microscopy (TEM) was used to image specimens, prepared by Focused Ion Beam (FIB).

Date

Publication

INTERMAG 2003