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Publication
SISPAD 2002
Conference paper
Technology modeling for emerging SOI devices
Abstract
New physical models, algorithms, and parameters are needed to accurately model emerging silicon-on-insulator (SOI) devices. We discuss key modeling tools and methodologies used to support research, development, and manufacturing of emerging SOI device technology. Although commercial TCAD tools are available, new physical models, parameters, and algorithms are needed to study these novel device structures.