Publication
ESSDERC 1992
Conference paper

Ta/polyimide adhesion durability

Abstract

The adhesion durability of Ta to plasma-modified polyimide surfaces has been investigated under thermal exposure. The failure mechanism was correlated with Auger analysis. Resistance to oxidation at the Ta/polyimide interface was found necessary to obtain a durable metal/polymer adhesion strength.

Date

14 Sep 1992

Publication

ESSDERC 1992