John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
No abstract available.
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Martin C. Gutzwiller
Physica D: Nonlinear Phenomena
R.B. Morris, Y. Tsuji, et al.
International Journal for Numerical Methods in Engineering