American Chemical Society, Polymer Preprints, Division of Polymer Chemistry

Paper

01 Aug 1996

Synthesis of polyester graft copolymers via the macromonomer technique: Application of near-IR spectroscopy as a process monitor

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Preparation of high purity, anionic polymerization grade alkyl methacrylate monomers

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Polymer Bulletin

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Novel fluoropolymers for use in 157 nm lithography

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J. Photopolym. Sci. Tech.

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Development of an incremental structural parameter model for predicting reactive ion etch rates of 193 nm photoresist polymers

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SPIE Advances in Resist Technology and Processing 1999

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Fundamental investigations of the free radical copolymerization and terpolymerization of maleic anhydride, norbornene, and norbornene tert-butyl ester: In-situ mid-infrared spectroscopic analysis

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Macromolecules

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