N. Fender, P.J. Brock, et al.
Proceedings of SPIE - The International Society for Optical Engineering
N. Fender, P.J. Brock, et al.
Proceedings of SPIE - The International Society for Optical Engineering
D.R. McKean, R.D. Allen, et al.
SPIE San Diego 1991
R. Sooriyakumaran, B. Davis, et al.
Microlithography 2004
R.D. Allen, G. Breyta, et al.
J. Photopolym. Sci. Tech.