Gregory Czap, Kyungju Noh, et al.
APS Global Physics Summit 2025
Gregory Czap, Kyungju Noh, et al.
APS Global Physics Summit 2025
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011