Superconducting thin films of Y-Ba-Cu oxide have been prepared on yttria-stabilized zirconia substrates using metal trifluoroacetate spin-on precursors. The films exhibit an extremely sharp resistive transition with zero resistance at temperatures as high as 94 K. The superconducting phase is formed by a three-step process: (a) decomposition of the spun-on trifluoroacetate film to the fluorides, (b) conversion of the fluorides to oxides by reacting with water vapor, and (c) annealing followed by slow cooling in oxygen. The properties of the films depend on the amount of conversion of the fluorides by reaction with water. Films which show the presence of some unreacted barium fluoride have strong c-axis normal preferred orientation, with a sharp resistive transition. When all the barium fluoride is converted, the film is more randomly oriented and exhibits a broader transition to zero resistance.