L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
Paper
Summary Abstract: Surface processes in plasma-assisted etching environments
Abstract
No abstract available.
Related
R. Ghez, M.B. Small
JES
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications
K.N. Tu
Materials Science and Engineering: A