William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
R.D. Murphy, R.O. Watts
Journal of Low Temperature Physics
P.C. Pattnaik, D.M. Newns
Physical Review B
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering