PublicationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsPaperSummary Abstract: Glass and metal thin-film Interlayers for low-temperature field assisted bondingJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsView publicationAbstractNo abstract available.Home↳ PublicationsDate01 Jul 1987PublicationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsAuthorsW.-Y. LeeF.O. SequedaJ.R. SalemD. ChapmanIBM-affiliated at time of publicationTopicsPhysical SciencesMaterials DiscoveryShare
