R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
No abstract available.
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications
J. Tersoff
Applied Surface Science