PublicationJVSTAPaperSummary Abstract: Energy distributions of electronically excited molecules produced by ion bombardment of siliconJVSTAView publicationAbstractNo abstract available.Home↳ PublicationsDate01 Jan 1985PublicationJVSTAAuthorsR.E. WalkupPh. AvourisIBM-affiliated at time of publicationTopicsPhysical SciencesMaterials DiscoveryShare