Sub-100-nm-Resolution Zone Plate Soft x-Ray Microscope Using Undulator Radiation

Abstract

A high-resolution soft X-ray microscope has been constructed using a Fresnel zone plate (FZP) as its objective and undulator radiation as its source. The FZP used has the outermost zone width of 50 nm corresponding to theoretical spatial resolution of 60 nm as a microscope. An experiment has shown that the microscope attained resolution better than 100 nm. © 1993 The Japan Society of Applied Physics.