Jerng-Sik Song, Chin-An Chang
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
This paper describes the characterization of a home-made negative photoresist developed by IBM. This resist, called SU-8, can be produced with commercially available materials. Three blends were prepared for this article and some of its optical and mechanical properties are presented. One of its numerous advantages is the broad range of thicknesses which can be obtained in one spin: from 750 nm to 450 μm with a conventional spin coater. The resist is exposed with a standard UV aligner and has an outstanding aspect ratio near 15 for lines and 10 for trenches. These ratios combined with the electroplating of copper allow the fabrication of highly integrated electromagnetic coils.
Jerng-Sik Song, Chin-An Chang
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
J. Tersoff
Applied Surface Science
Edward A. Whittaker, Gary C. Bjorklund
CLEO 1983
C.-K. Hu
MRS Spring Meeting 1998