Study of capacitive rf discharge characteristics through particle simulations

Abstract

With the extensive application of capacitively coupled rf discharges much effort have been conducted to model these systems. One significant model is the particle-in-cell Monte Carlo collisions (PIC-MCC) simulations which have contributed much to the understanding of rf capacitive discharge phenomena. For this reason, the paper also present several applications of the PIC-MCC method including the results generated from each.