Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Three techniques for investigating the microstructure of amorphous materials are described. These include incoherent dark field microscopy, analysis of extended fine structure on the elemental core excitations, and analysis of the elastic diffraction pattern. All of these can be implemented with a Scanning Transmission Electron Microscope, allowing comparison of complementary results obtained under similar conditions. © 1980.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
T.N. Morgan
Semiconductor Science and Technology