Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
New substituted compounds of composition Bi2-xPbxSrNb2O9-x/2 ([formula omitted]) have been isolated as single phases, keeping the basic structure of the Aurivillius oxides. These materials were characterized by X-ray powder diffraction methods, at different temperatures up to 850 °C, showing crystallographic transformations which could be related with a ferroelectric behavior. Measurements of the dielectric constant ([formula omitted]) as a function of the temperature for x = 1 and x = 1.5 compositions show an anomalous behavior in the real component, that could confirm the existence of a phase transition. © 1994, Taylor & Francis Group, LLC. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
A. Gangulee, F.M. D'Heurle
Thin Solid Films
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures