Publication
Symposium on Process Physics and Modeling in Semiconductor Technology 1990
Conference paper

Stress-driven segregation at a Si-Ge alloy surface

Abstract

Monte-Carlo calculations indicate that the (100) surface of a Si-Ge alloy exhibits a complex pattern of surface segregation, with significant deviations from bulk stochiometry throughout the first four layers. This segregation is driven by the stress associated with the 2×1 surface reconstruction. Implications for MBE growth are discussed.

Date

Publication

Symposium on Process Physics and Modeling in Semiconductor Technology 1990

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