Conference paper
Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
No abstract available.
J. LaRue, C. Ting
Proceedings of SPIE 1989
W.C. Tang, H. Rosen, et al.
SPIE Optics, Electro-Optics, and Laser Applications in Science and Engineering 1991
Kenneth L. Clarkson, K. Georg Hampel, et al.
VTC Spring 2007
John R. Kender, Rick Kjeldsen
IEEE Transactions on Pattern Analysis and Machine Intelligence