Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We present a theory of charge distributions induced at a jellium surface by a static applied potential. Exact expressions are derived for the changes in surface potential, and the total potential barrier in terms of the unperturbed electron distribution and the change in the latter due to adding electrons to the jellium. These results are applied to a simple chemisorption model and the induced dipole moment is calculated as a function of proton position for several rs values. © 1975 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Small
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ACS Nano
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Surface Science