Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011
No abstract available.
Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011
Ligang Lu, Jack L. Kouloheris
IS&T/SPIE Electronic Imaging 2002
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
Tong Zhang, G.H. Golub, et al.
Linear Algebra and Its Applications