W.C. Tang, H. Rosen, et al.
SPIE Optics, Electro-Optics, and Laser Applications in Science and Engineering 1991
No abstract available.
W.C. Tang, H. Rosen, et al.
SPIE Optics, Electro-Optics, and Laser Applications in Science and Engineering 1991
Da-Ke He, Ashish Jagmohan, et al.
ISIT 2007
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989