Conference paper
Airborne chemical contamination of a chemically amplified resist
Scott A. MacDonald, N.J. Clecak, et al.
Microlithography 1991
The technique of laser transfer sampling is described and applied to obtain IR spectra of organic surface films. Spatially resolved transfer across a vacuum gap Is demonstrated at 1064 and 248 nm, occurring by different, highly directional mechanisms. Laser interference in the gap and surface topography of the sample are shown to modulate the transferred film patterns. © 1990, American Chemical Society. All rights reserved.
Scott A. MacDonald, N.J. Clecak, et al.
Microlithography 1991
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Chemical Physics Letters
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