Israel Cidon, Leonidas Georgiadis, et al.
IEEE/ACM Transactions on Networking
Thermal stresses are a major concern in the reliability of metal lines. This paper addresses some modeling issues concerning the determination of thermal stresses in such structures. Specifically, a finite element technique that allows one to follow the evolution of the stress field as a function of the steps of the manufacturing process is discussed. In addition, comparisons between several modeling strategies, namely, plane stress versus plane strain, geometric nonlinearity versus geometric linearity, “frozen view” models versus “evolving” models, etc., are presented. A detailed example describing the manufacturing of a copper line is included to illustrate these points. © 1993 by ASME.
Israel Cidon, Leonidas Georgiadis, et al.
IEEE/ACM Transactions on Networking
Victor Valls, Panagiotis Promponas, et al.
IEEE Communications Magazine
S. Sattanathan, N.C. Narendra, et al.
CONTEXT 2005
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering