Conference paper
NEW MATERIALS FOR HIGH RESOLUTION OPTICAL LITHOGRAPHY.
R.D. Miller
ACS Fall 1984
High molecular weight polysilane derivatives represent a new class of radiation sensitive polymers with very unusual electronic properties for which a number of potential applications have been discovered. This talk will touch briefly on polymer synthesis and characterization, mechanisms for the photo chemical decomposition and describe certain selected applications. Copyright © 1989 Wiley‐VCH Verlag GmbH & Co. KGaA, Weinheim
R.D. Miller
ACS Fall 1984
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