William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
SUMMARY: An efficient method for simulating a nonhomogeneous Poisson process with rate function λ(t) = exp(α0+α1t) is given. The method ia based on an identity relating the nonhomogeneous Poisson process to the gap statistics from a random number of exponential random variables with suitably chosen parameters; it avoids costly ordering and taking of logarithms required by direct simulation methods and is more efficient than time scale transformations of a homogeneous Poisson process. © 1976 Biometrika Trust.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
F. Odeh, I. Tadjbakhsh
Archive for Rational Mechanics and Analysis
Zhihua Xiong, Yixin Xu, et al.
International Journal of Modelling, Identification and Control
Hang-Yip Liu, Steffen Schulze, et al.
Proceedings of SPIE - The International Society for Optical Engineering